MEMS-Micro Electro Mechanical Systems
Course Code BME 405C
CIE Marks 50
Teaching Hours/Week (L: T:P: S) 3:0:0:0
SEE Marks 50
Total Hours of Pedagogy 40
Total Marks 100
Credits 03
Exam Hours 03
Examination type (SEE) Theory
Module-1
MEMS: Introduction, Production Engineering, Precision Engineering and Ultra- Precision
Engineering, Integrated circuits, Micro Electro Mechanical Systems.
Module-2
Micromachining: Introduction, Photo Lithography, Structural and Sacrificial Materials, Etching,
Surface Micromachining, Bulk versus Surface Micromachining, Wafer Bonding, LIGA.
Module-3
System Modelling: Introduction, Need for Modelling, System types, Basic Modelling Elements In
Mechanical System, Basic Modelling Elements In Electrical Systems, Basic Modelling Elements In
Fluid Systems and Thermal Systems.
Module-4
Mechanical sensors and actuators: Introduction, Principles of Sensing and Actuation, Beam and
Cantilever, Micro Plates, Capacitive Effects, Piezo Electric Material as Sensing and Actuating
Elements.
Module-5
Micro-Opto-Electro Mechanical Systems: Introduction, Fundamental Principles of MOEMS
Technology, Review on Properties of Light, Light Modulators, Micro mirrors, Digital Micro mirror
Device.
Suggested Learning Resources:
Books
1. MEMS- Nitaigour Premchand Mahalik, TMH 2007.
2. Micro and Smart Systems: G.K.Ananthasuresh, K.J.Vinoy, S.Gopalakrishnan,
K.N.Bhat,V.K.Aatre,Wiley India 2010.
3. Design and Development Methodogies, Smart Material Systems and MEMS: V. Varadan,
K. J. Vinoy, S. Goplakrishnan, Wiley.
4. MEMS & Microsystems: Design and Manufacture, Tai-Ran Hsu, Tata Mc-Graw-Hill.
Web links and Video Lectures (e-Resources):
• VTU e-Shikshana Program
• VTU EDUSAT Program.
Activity Based Learning (Suggested Activities in Class)/ Practical Based learning
• Gaining hands on Knowledge to work on ANSYS Tool
• Simulation of Cantilever Beam For Different Loads On ANSYS Tool.
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