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Course Code : 18EC822
CIE Marks :40
Lecture Hours/Week : 03 
SEE Marks : 60
Total Number of Lecture Hours : 40 (8 Hrs /Module) 
Exam Hours :03

Course Learning Objectives: This course will enable students to:

  • Understand overview of microsystems, their fabrication and application areas.
  • Working principles of several MEMS devices.
  • Develop mathematical and analytical models of MEMS devices.
  • Know methods to fabricate MEMS devices.
  • Various application areas where MEMS devices can be used.


Overview of MEMS and Microsystems: MEMS and Microsystem, Typical MEMS and Microsystems Products, Evolution of Microfabrication, Microsystems and Microelectronics, Multidisciplinary Nature of Microsystems, Miniaturization. Applications and Markets. L1, L2


Working Principles of Microsystems: Introduction, Microsensors, Microactuation, MEMS with Microactuators, Microaccelerometers, Microfluidics. Engineering Science for Microsystems Design and Fabrication: Introduction, Molecular Theory of Matter and Inter-molecular Forces, Plasma Physics, Electrochemistry. L1,L2


Engineering Mechanics for Microsystems Design: Introduction, Static Bending of Thin Plates, Mechanical Vibration, Thermo mechanics, Fracture Mechanics, Thin Film Mechanics, Overview on Finite Element Stress Analysis. L1,L2


Scaling Laws in Miniaturization: Introduction, Scalin gin Geometry, Scaling in Rigid-Body Dynamics, Scaling in Electrostatic Forces, Scaling in Fluid Mechanics, Scaling in Heat Transfer. L1,L2


Overview of Micromanufacturing: Introduction, Bulk Micromanufacturing, Surface Micromachining, The LIGA Process, Summary on Micro manufacturing. L1, L2

Course Outcomes: After studying this course, students will be able to:

1.Appreciate the technologies related to Micro Electro Mechanical Systems.
2. Understand design and fabrication processes involved With MEMS Devices.
3. Analyze the MEMS devices and develop suitable mathematical models.
4. Know various application areas for MEMS device.
5 . Describe the Micromanufacturin g.

Question paper pattern:

Examination will be conducted for 100 marks with question paper containing 10 full questions, each of 20 marks.
Each filll question can have a maximum of 4 sub questions.
There will be 2 full questions from each module covering all the topics of the module.
Students will have to answer 5 full questions, selecting one full question from each module.
The total marks will be proportionally reduced to 60 marks as SEE marks is 60.

Text Book:

Tai—Ran Hsu, MEMS and Micro systems: Design, Manufacture and Nanoscale Engineering, 2nd Ed, Wiley.

Reference Books:

1. Hans H. Gatzen,Volker Saile, JurgLeuthold, Micro and Nano Fabrication: Tools and Processes, Springer, 2015.
2. Dilip Kumar Bhattacharya, Brajesh Kumar Kaushik, Microelectromechanical Systems (MEMS), Cengage Learning.

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