MEMS & MICROSYSTEM TECHNOLOGY (BME613C)

MEMS & MICROSYSTEM TECHNOLOGY

Course Code BME613C
CIE Marks 50
Teaching Hours/Week (L: T:P: S) 3­-0-­0-­0 
SEE Marks 50
Total Hours of Pedagogy 40 
Total Marks 100
Credits 03 
Exam Hours 3
Examination type (SEE) Theory

Module­ 1

Introduction to Micro and Smart systems: Miniaturization, Microsystems versus MEMS, Micro-fabrication, Smart Materials, Structures & Systems, Integrated Microsystems, Application of Smart Materials & Microsystems.

Module­ 2

Micro and Smart Devices and Systems: Principles and Materials: Definitions and salient features of sensors, actuators, and systems,

Sensors: silicon capacitive accelerometer, piezoresistive pressure sensor, Portable blood analyser, conductometric gas sensor.

Actuators: Micro mirror Array for Video Projection, Piezo­electric based inkjet print head, electrostatic comb­drive, Magnetic micro relay.

Module­ 3

Micromachining Technologies: Silicon as a Material for Micromachining, Silicon wafer preparation, thin­film deposition techniques, Lithography, Etching, Silicon micromachining: surface micromachining bulk micromachining. Specialized Materials for Microsystems.

Module­ 4

Electronics Circuits for Micro and Smart Systems. Semiconductor devices: Diode, Schottky diode, Tunnel diode ,MOSFET,CMOS circuits ,Electronics Amplifiers ,Op­Amp based circuits .

Module ­5

Implementation of Controllers for MEMS & Case Studies of Integrated Microsystems. Design Methodology, PID controller, Circuit Implementation, Digital controller, Microcontroller & PLC. Case Studies of Integrated Microsystems: BEL pressure sensor, design considerations, performance parameters, Smart Structure in vibration control.

Suggested Learning Resources:

Books

1. Micro and Smart Systems: G.K.Ananthasuresh, K.J.Vinoy, S.Gopalakrishnan, K.N.Bhat, V.K.Aatre,Wiley India 2010.

2. Design and Development Methodologies, Smart Material Systems and MEMS: V. Varadan,K. J. Vinoy, S. Goplakrishnan, Wiley.

3. MEMS­ Nitaigour Premchand Mahalik, TMH 2007.

4. MEMS & Microsystems: Design and Manufacture, Tai­Ran Hsu, Tata Mc­Graw­Hill